Preparation of Ultrafine Polycrystalline Diamond Cutting Tool Coatings

The present invention provides a method for preparing suitable for ultra-fine crystalline diamond cutting tool coatings. Specific steps are as follows:

a) The cutting tool substrate a deposition reaction chamber;

b) The deposition reaction chamber is evacuated to a vacuum state;

c) Forming a magnetic field in the deposition reaction chamber;

d) Mounted to the cathode deposition reaction chamber, a high current is applied between the anode and the DC arc deposition reaction chamber purged with argon Ar, H2 and methane CH4 three hydrogen gas; wherein the arc current is applied 150A ~ 250A; the ratio of the methane introduced into CH4 / H2 hydrogen gas is 0.5 to 10%; passed into argon Ar flow 2000 ~ 4000sccm;

E) In the deposition chamber, the gas in the arcing CH4 generated carbon radical C, under certain temperature conditions C Radical carbon deposition substrate surface to the cutting tool into the polycrystalline diamond thin film; wherein the deposition reaction chamber temperature of 600 ℃ ~ 1000 ℃; working pressure of 0.9mbar ~ 2mbar; deposition time is 3 ~ 30h.

The present invention, by controlling the deposition temperature of the reaction chamber (600 ℃ ~ 1000 ℃), the working pressure (0.9mbar ~ 2mbar), gas flow rate, deposition time (3 ~ 30h) and other process parameters to control the growth of diamond grains, obtaining about for the 0.3 ~ 1μm fine grain diamond coating, which makes cutting tools coated with better performance of the diamond coating, machining and longer life.


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