Electrochromism: Ti Doped Tungsten Trioxide Film

When it comes to electrochromism, many people will think of WO3 film and Ti doped tungsten trioxide film, which may be applied to building glass for cooling the room in summer and warming the room in winter. And you may know that experts prepared Ti-doped WO3 films to study the effects of different oxygen partial pressures on the structural properties of the films. You even know the specific preparation steps, just shown as follows:

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A Ti-doped WO3 film was deposited by pulsed DC power source reactive sputtering on a FTO transparent conductive glass (sheet resistance of -20 Ω) using a tungsten-titanium alloy (containing 6% of titanium) as a target. Before the sputtering, the background vacuum is pumped to below 4.5*10-4Pa, high purity argon (99.9% Ar) is used as the working gas, high purity oxygen (99.9% O2) is used as the reaction gas, the substrate temperature is 350°C, and the working pressure is fixed to 1.7Pa, Ti-doped WO3 film with different oxygen partial pressure was deposited by changing the flow rate of O2 into 7sccm, 9sccm, 13sccm, 15sccm. Because the working pressure is fixed, when the O2 flow rate increases, the Ar partial pressure decreases, the amount of Ar+ bombarded on the surface of the target per unit time decreases, and the sputtered W atoms decrease, resulting in a decrease in deposition rate.

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