The present invention provides a method for tungsten chemical vapor deposition apparatus abnormality detection. Specific steps are as follows:

1) Set the accuracy of the scan and the scan signal to noise ratio of tungsten hexafluoride with silane gas prior to the reduction reaction of the wafer to obtain the initial number of fine particles;

2) The tungsten chemical vapor deposition apparatus of silane and tungsten hexafluoride gas reduction reaction of a tungsten film on the wafer surface;

3) Scan the same SNR and a tungsten film formed on the surface accuracy of scanning the wafer number of fine particles obtained after the reaction;

4) Analyzing the number of fine particles after the initial reaction of the fine particles to increase the number of fine particles as compared to the wafer surface is a gas phase nucleation of fine particles of tungsten;

5) If the fine particles are not scanned vapor nucleation of fine particles of tungsten, tungsten chemical vapor deposition apparatus is introduced into the gas control means that no abnormality has occurred;

6) If the scan is fine particles to the gas phase nucleation of fine particles of tungsten, tungsten chemical vapor deposition apparatus is introduced into the gas control means is abnormal.

W can be accurately determined whether a chemical vapor deposition apparatus of the present invention by the method of abnormality, and the process does not affect the continuity.


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The present invention provides a silicon laser cladding nickel titanium - tungsten carbide composite coating material preparation methods, and its purpose is to be prepared by laser cladding Ni3 (Si, Ti) intermetallic compounds in the Ni-base superalloy substrate, Ni-based solid solution , ceramic composite coating composition of TiC-coated WC; coating material mainly containing Ni, Si, Ti, and four WC powders, in weight percent: WC 8% to 20%, the balance being Ni78Si13Ti9;

The preparation method of using the laser cladding process parameters:

Output power 1200-1500W, scanning speed 4-8mm / s, spot diameter 4mm, protective cladding when gas is Ar gas, clad base material is a nickel-base superalloy, the steps are: the above ratio, the coating material mixing, thermal spray coating or pre-nickel-based superalloy substrate surface 0.8 ~ 1.0mm; multi-pass scanning laser cladding, each lap 1.8mm, available in different thickness of the cladding layer.


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Electroless nickel plating of iron-based powder metallurgy products, which is the original plating process of electroless nickel plating process into steps, adding chemicals in electroless nickel plating process, the chemical components of the solution:

NaH2PO2. H2O: 1.5 ~ 3.0%; NiSO4.6H2O: 2.0 ~ 3.5%; NaC2H3O2: 0.2 ~ 0.8%; Na2CO3: 1.0 ~ 2.2%; CH3CHOHCO2H: 2. 0 ~ 3.5%; H2O: 80.0 ~ 95.0%

Process conditions:

1) Preparation of electroless plating solution is first weighed NaH2PO2. Uniformly dissolved and stirred H2O, NaC2H3O2 placed 50 ~ 85 ℃ 200 g Water;

2) was added with stirring and then adding the remainder of the NiSO4.6H2O uniformly dissolved in water;

3) and finally adding Na2CO3 CH3CHOHCO2H, chemical bath was adjusted to PH value 5.0-6.5, filtered through filter paper Serve.

Electroless nickel plating process is the surface roughness after polishing, blasting, cleaning, degreasing, pickling processes activated after iron-based powder metallurgy products, placed in a chemical bath at a temperature of 80 ~ 95 ℃ soak for 20 ~ 60 minutes, then washed, fine polishing, cleaning process after the completion of the iron-based powder metallurgy products coated on amorphous Ni-P alloy layer.


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This invention relates to a carbon-based coating of tungsten, characterized in that: a substrate comprising carbon and tungsten coating of two parts, a dense and uniform coating layer having a thickness of tungsten is firmly attached to the surface of the carbon matrix. Pure tungsten plate as the target. Carbon material as the matrix, Select C / C composites and graphite.

Advantage of the present invention is:

A) depositing a tungsten coating speed, greatly improving the efficiency of the preparation of the coating;

B) high density plasma generated between the tungsten target cloud and carbon, a large number of tungsten atoms only covers the surface of the carbon substrate, the substrate and the back side is attached to the package tungsten coating;

C) coating the surface of a dense, no cracks;

D) coating and C / C composites bonded to the substrate better.


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