The Effect of the Matrix Diameter on CVD Tungsten Tube Morphology

Experimental materials and reagents are as follows:

H₂: High Purity(99.999％),it is reduction gas;

WF₆: High Purity(99.9％),it is reactant gas;

Ar: High purity(99.999％), it is used in the reaction system for evacuating air;

Deposition Substrate: copper (there are different diameters: 6mm, 10mm, 16mm, and 35mm);

Tungsten tube is processed by CVD (Chemical Vapor Deposition) method.

Under the following conditions: the deposition temperature is the same (600 ℃), and the deposition matrix diameters (6mm, 10mm, 16mm, 35mm) is different. The morphology of tungsten tube obtained by the aforementioned condition is fine columnar crystals and its growth direction is almost identical to brass radial.

By comparing the microscopic morphology of tungsten tube obtained under the above conditions, what is found that the parameters of tungsten tube in the subsequent depositing process can be ignored, that is to say, you can ignore the impact of the deposition matrix diameter on tungsten tube matrix microstructure morphology.


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