Tungsten Film Coating Method Using Tungsten Oxide Powders(二)

After a Cu substrate is contacted with tungstenoxide powders, thermal reduction treatment is carried out under hydrogen atmosphere. Namely, the present method includes the steps of putting a substrate of Cu, Ni, Fe, Co, Cr, W, or the like in an upper, middle, or lower portion of a tungsten oxide (WO3or WO2.9) layer and carrying out thermal treatment thereon under a hydrogen atmosphere.

Such a coating method is widely applicable to another species of the metal substrate such as Ni, Fe, Co, Cr, W, and the like as well as Cu. Therefore, the tungsten oxide thin film method according to the present method is applicable to any kind of metal substrates.

A tungsten thin film according to the present method can be coated 500 nm˜25 μm thick by carrying out thermal treatment for 10 minutes to six hours at a temperature range between 650˜1050° C.

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