Application of Barium Tungsten Electrode in Ion Beam Generator
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- Category: Tungsten Information
- Published on Monday, 09 June 2025 19:30
Due to its low work function, high stability and long life, barium tungsten electrode is mainly used as hot cathode material in ion beam generator, and is widely used in electron emission and ionization process, especially in semiconductor processing, thin film preparation and space propulsion.
1. Efficient electron emission: Barium tungsten electrode has low work function and can emit many electrons at a lower temperature. This is crucial for the electron bombardment ion source in the ion beam generator, which can increase the electron flow density and enhance the ionization efficiency of gas molecules.
2. High temperature stability: Barium tungsten material can still maintain stable chemical and physical properties in high temperature environment, which is suitable for the long-term operation of ion beam generator. The addition of barium reduces the surface barrier and enhances the thermal electron emission capability, while the tungsten matrix provides mechanical strength and corrosion resistance.
3. Extended service life: Compared with traditional pure tungsten cathodes, barium tungsten electrodes have a longer service life due to their low work function and anti-toxicity (tolerance to residual gases such as oxygen), reducing the maintenance frequency of ion beam generators.
4. Specific application scenarios of barium tungsten electrodes in ion beam generators:
Ion beam etching: In semiconductor manufacturing, barium tungsten electrodes are used to generate stable ion beams and accurately control the etching process.
Ion beam sputtering: Used for thin film deposition, providing high-energy ion flow to sputter target materials.
Space propulsion: In ion thrusters, barium tungsten electrodes serve as electron sources to support the ionization of propellants and generate high-specific impulse ion beams.
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