Tungsten Oxide Nano Flower Films Pt Doped

The Pt doping technique can fully improve the electrochromic properties of the tungsten oxide nano flower film, and the Pt doping process of the tungsten oxide nano flower film is as follows:

（1）The tungsten oxide nanoflowers were placed in a magnetron sputtering apparatus and sputtered with a 4mA sputtering current for 10s under a chamber temperature of 25 ° C and a degree of vacuum of 4.0 × 10-1 Pa. A Pt thin film layer is sputtered on the film surface to obtain a Pt surface modified tungsten oxide nano flower structure film. In the SEM image of the substrate section after the tungsten oxide nano flower, it can be seen that tungsten oxide nano flower is grown on the upper layer of the nano wire and the structure has more electron transport channels.

（2）Pt doping: Plating electrodes on both ends of the sensing element, then lead package. Place the mask over the tungsten oxide nano flower film. Then, a sputtering current of 0.6 A was sputtered for 30 seconds by a magnetron sputtering method under a vacuum degree of 5 Pa. Two tungsten electrodes spaced 3.0 mm apart and 5.0 mm wide were deposited on the Pt surface modified tungsten oxide nanoflowers. Finally, lead package, to achieve good electrical contact with the outer conductor, get Pt surface modified tungsten oxide nano structure thin film hydrogen sensor.

Can be seen more nano flower structure, a diameter of 4-6μm, nanoflowers cross each other, with a more stable contact junction, to provide more electron transfer channels. Multiple nanorods around the center of growth, was branched structure. Length of 2μm-3μm, diameter of 200 nm, with more electronic transmission channels. Which can improve the adsorption rate of gas molecules and improve the responsiveness of hydrogen sensing. The diffraction peaks at 23.6 °, 26.6 °, 28.9 °, 34.1 ° and 41.1 ° in the XRD spectrum correspond to triclinic tungsten oxide indicating that the film has high crystallinity and has been fully oxidized to tungsten oxide.

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