Compact Tungsten and High Purity Tungsten

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Category: Tungsten Information
Published on Tuesday, 07 November 2017 13:55
Compact tungsten and high purity tungsten are pure tungsten whose purity is higher than 99.99%, which is generally marked as 4N.
 
high purity tungsten image
 
High purity tungsten refers to the tungsten powder with purity of 99.999% and 99.9999%, which is generally labeled as 5N or 6N, and the English name is high-purity tungsten.
 
Compact tungsten, high purity tungsten and their silicides are mainly used in very large scale integrated circuits as resistive layers, diffusion barriers and the like in metal oxide semiconductor transistors as door materials and connecting materials, which are expensive on the market.
 
The shape of compact tungsten and high purity tungsten can be foil, foil, target, fine wire, insulated wire, straight bar, round tube, powder, single crystal, etc.. The methods of preparing dense tungsten and high-purity tungsten are powder metallurgy and chemical vapor deposition.
 
Powder metallurgy refers to tungsten powder after forming, heated to a certain temperature of the melting point of the material through the migration is complete densification, finally get the high pure tungsten, this process is less, the cost is relatively low. The principle of chemical vapor deposition is characterized by the melting point and boiling point of tungsten fluoride with six tungsten fluoride (WF6) as the tungsten source (melting point 2.3 °C, boiling point 19.9°C). It is purified by distillation or distillation, and is reduced by H2 at a certain temperature. The deposited tungsten is deposited on a specific substrate, after the deposition is completed, the compact tungsten billet is removed by the substrate material. This method is simple and widely used.
 

 

 

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