WO3 Nano Thin Film

WO3 nano thin film, which is more and more widely used in smart glass of building, can be prepared by a sputter coating method. For example, some experts have prepared nano tungsten trioxide thin films by DC reactive magnetron sputtering on unpolished Al2O3 substrates. Experts say that magnetron sputtering is a commonly used sputter coating method. So, do you know the principle of magnetron sputtering method?

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http://www.tungsten-powder.com/tungsten-oxide.html

The principle of magnetron sputtering method is: use high-energy particle beam to bombard the surface of the target, so that the atoms on the surface of the target can escape from the bond between the atoms; the magnetic field with a certain intensity in a certain direction can control the escaping atoms or secondary electrons to move regularly in the form of a wheel yaw; by binding atoms or secondary electrons to the surface of the target, the glow can be maintained and sputtered.

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