Doped WO3 Thin Film

Doped WO3 thin film can be prepared by electron beam evaporation method. For example, some experts used the mixed powder of WO3 and CNT as raw materials to prepare NWCNT doped WO3 film on the Al2O3 substrate by electron beam evaporation method. According to experts, the electron beam evaporation method is one of the evaporation coating methods. And the evaporation coating method is one of the physical vapor deposition methods.

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Experts say that physical vapor deposition method is a widely used film-forming method in the laboratory. Compared with other methods, this method has a faster speed to synthesize the film. And its film purity is higher, surface uniformity is better. Moreover, some high melting point reactants can be used for the preparation of doped WO3 films. While the reaction apparatus is costly, so it is not suitable for large scale production of thin film materials. Experts also said that the principle of electron beam evaporation method is to use a high-energy electron beam to bombard the surface of the target, so that the surface of the material produces a very high temperature, therefore the material is directly sublimated from the solid state to the gaseous state, and therefore deposited on the surface of the workpiece to form a film.

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