Industry Standards of Tungsten Crucible for Semiconductor Devices: Brands, Types, Specifications, Technical Requirements

Tungsten boat is formed by tungsten sheet through high-pressure tungsten which has a good electrical conductivity, so it is widely used in kinescope, mirror making, toys, household appliances, mobile phones, electrical enclosure and other electronics industries. In recent years, tungsten boat for semiconductor devices has also been given considerable attention by the public. Semiconductors are crystalline or amorphous solids with distinct electrical characteristics, using special electrical characteristics to complete the specific functions of electronic device. Therefore, related industries develop the relevant standards for tungsten boat for semiconductor devices. The followings include brands, models, specifications, technical requirements, test methods, inspection rules, mark, packing, transportation and storage.

Grades of tungsten boat can be named as WZO in according with the chinese phonetic alphabet "wolfram" and "boat". Tungsten boat models can be express as "V" and "U", different types of each model use the Roman numerals Ⅰ, Ⅱ, Ⅲ to represent. Tungsten boat specifications should be express in number in the format "- the wall thickness of the boat - the boat width." Applications should correspond to the marks and models. For example, WZO-V-Ⅰ-02-17, its brand is represented by WZO, V-type non-pressure side with 0.3mm tungsten boat wall thickness, 15mm tungsten boat width. Except that, the surface quality of tungsten boat should always keep in a clean condition, the color is silver-white metallic luster without any cracks, stratification, lack of edge and other defects. All parts of the tungsten boat cannot have glitches. Performance of tungsten plate used by tungsten boat should accord with the national GB3875 requirement. Using the accuracy of 0.02mm caliper and 0.01mm micrometer to measure tungsten boat size, according to national standard GB4196 tungsten boat standards. The weight of tungsten boat should be weight in a balance with a 0.2g sensibility of balance. If the chemical composition of tungsten boat is qualified, it is no need for measuring the melting point.

With the rapid development of tungsten boat for semiconductor devices, the threat of environmental pollution of tungsten boat is also rising. Tungsten compounds such as tungsten carbide dust, tungsten oxide, tungsten carbide, and tungsten boat have a great impact on health which would cause inflammation of eyes or skin and some respiratory diseases such as asthma, if people deal with it for a long time. 

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