CVD Tungsten Tube --- Compare Fluoride and Chloride

Compare fluoride (WF6) CVD (Chemical Vapor Deposition) to Chloride CVD findings, which shows that fluoride CVD tungsten tube has advantages as follows:

Low impurity content. Most metal fluoride having a boiling point over 1000 ℃. Therefore, at a constant temperature (about 20-28 ℃), in WF₆ evaporation stage, WF₆ is able to separate with most of other associated impurities.

Reduction reaction: WF₆ + H₂ → W + 6HF (125Kj/mol)

At a standard atmospheric pressure, the reaction can be achieved when the reaction temperature is above 300 ℃; at the temperature of 600 ℃, the equilibrium constant of the reaction is close to 1.

Because of the low reaction temperature for the reaction, it is possible to use ordinary heating equipment (such as stainless steel equipment, etc.), which makes the production of the heating equipment and actual operation easier. That is to say, the choice of fluoride CVD method for preparing tungsten tube is relatively plentiful.


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