CVD Tungsten Tube Morphology (1)

CVD tungsten tube morphology:

In the CVD (Chemical Vapor Deposition) process, due to the chemical reaction with H₂, WF₆ adsorbed on the surface of the copper matrix reduce to tungsten atom, and these tungsten atoms will gather nucleation on the copper matrix surface and grow, at last, the tungsten tube is formed by cutting and other process.

The formation of the first layer of the microstructure is related to the forming process of the initial crustal nucleus of tungsten layer and nuclei initial growing up process.

Tungsten atoms will deposit and diffuse on the surface of the deposition matrix and gather on the surface of the active matrix position, these positions are usually near the grain boundary, surface level position and the crystal defect surface outcrops.

When nucleation aggregated reach a certain degree of supersaturation, the deposited layer of crystals will form initial nuclei. Because those active sites presented on the deposit surface distribution is not uniform, so, from the microscopic point of view, the initial deposition surface nuclei are not uniformly distributed.


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