Low-pressure Tungsten Alloy Plasma Technique

For the technical realization of low-pressure plasma processes, one requires equipment with the following components:
Vacuum system (pump, vessel)
Energy supply
Gas supply
Measurement and control components for the reproducible adjustment of the process parameter

Due to the necessity of a vacuum system in most cases, batch operation method is the easiest solution. The processes can be flexibly and complexly configured, in order to change the mode of action of the tungsten alloy plasma technique through variation of the process parameters (pressure, gas flow, gas composition, power) and can attain different effects in one process step. So that, i.e. without great expenditure a secondary cleaning can be carried out and immediately thereafter a corrosion protection layer becomes deposited, without having to aerate in between.


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