Manufacturing Method of Tungsten Oxide Through Holes

The invention discloses a manufacturing method of tungsten oxide through holes.

The manufacturing method of the tungsten oxide through holes comprises the following steps:

(1) Forming tungsten through holes according to an existing technology, filling tungsten, and carrying out tungsten planarization.

(2) Forming tungsten oxide through oxidation.

(3) Depositing a layer of oxidation film or a dielectric substance layer which can achieve the same effect on the surface of the tungsten oxide formed in the step (2) by adopting chemical vapor deposition.

(4) Grinding the oxidation film or the dielectric substance layer which can achieve the same effect to expose the tungsten oxide by adopting a grinding mode or a method of dry method back carving, and thus forming the tungsten oxide through holes.

The manufacturing method of the tungsten oxide through holes solves the problem of leakage access formed between a top metal layer and a tungsten through hole titanium nitrogen compound barrier layer, and can improve a resistive random access memory erase operation window and reliability.


Tungsten Manufacturer & Supplier: Chinatungsten Online - http://www.chinatungsten.com
Tel.: 86 592 5129696; Fax: 86 592 5129797
Email:   sales@chinatungsten.com
Tungsten News & Tungsten Prices, 3G Version: http://3g.chinatungsten.com
Tungsten News & Tungsten Prices, WML Version: http://m.chinatungsten.com

The above is reproduced from: Application Technology Network, if in doubt, please contact the content belongs website.

• < Prev
• Next >