Method for Preparing Gas-sensitive Sensor Element Based on Carbon Nano Tube Microarray/Tungsten Oxide Nano Composite Structure

The invention discloses a method for preparing a gas-sensitive sensor element based on carbon nano tube microarray/tungsten oxide nano composite structure,which comprises the following steps:

(1) template cleaning: the porous alumina template with acetone for 30 minutes remove the solvent, and then ethanol into the ultrasonic cleaning for 5 minutes, allowing drying;

(2) Preparation of porous tungsten oxide films: the template on the ultrahigh vacuum clean target magnetron sputtering apparatus of a vacuum chamber, the use of a purity of 99 mass 6.9% of tungsten as a target, the quality of purity of 99.999% argon gas as the working gas, the quality of purity of 99.999% of oxygen as the reaction gas in the step (1) of porous alumina template on standby sputter deposition of tungsten oxide porous film;

(3) microarray CNT / tungsten oxide composite structure: a) Preparation in Step (2) deposited porous templates / tungsten oxide porous film structure as a cathode, electrophoretic deposition of carbon nanotubes tube film, the electrophoretic deposition process: electrophoresis voltage is 30 ~ 100V, the run time of 0. 5 ~ lOmin, cathode and anode spacing of 1 ~ 5cm, electrophoretic fluid pre-settling time 30min ~ 2h, electrophoretic fluid pre ultrasonic dispersion time 1 tank; electrophoretic fluid with water, isopropanol and n-butanol as a dispersing agent of any one; electrophoresis anode electrode may be copper, aluminum electrode, stainless steel electrode of any one; single-walled carbon nanotube multi-walled carbon nanotubes, the use of pre-grinding Ih; b) removal of the tungsten oxide film is deposited on the surface of the porous carbon excess, the air for 10min, 6 (TC drying Ih; c) in the program sintering furnace at 400 - 600 ° C air atmosphere heat for 3-4 hours, controlling the heating rate is less than 2. 5 ° C / min, to obtain carbon nanotube microarrays / tungsten oxide nanocomposite structure;

(4) carbon nanotube-based microarray / tungsten oxide nano- The gas sensor element composite structure Preparation: by RF magnetron sputtering in the step (3) of carbon nanotubes obtained in microarray / tungsten oxide film deposited on the surface of molybdenum composite structure point electrodes formed gas sensor element.




Tungsten Manufacturer & Supplier: Chinatungsten Online - http://www.chinatungsten.com
Tel.: 86 592 5129696; Fax: 86 592 5129797
Email:   sales@chinatungsten.com
Tungsten News & Tungsten Prices, 3G Version: http://3g.chinatungsten.com
Tungsten News & Tungsten Prices, WML Version: http://m.chinatungsten.com

The above is reproduced from: Application Technology Network, if in doubt, please contact the content belongs website.

• < Prev
• Next >