The invention relates to a method for preparing tungsten trioxide by utilizing tungsten concentrate.

The method comprises the steps of: mixing and calcining tungsten concentrate and silicon dioxide to obtain calcined product containing the tungsten trioxide. By utilizing the method, the tungsten trioxide can be prepared in one step by utilizing the tungsten concentrate, so that the process flow can be shortened, the waste acid and alkaline liquid caused by the utilization of sodium hydroxide and hydrochloric acid in the prior art can be effectively avoided, the environment is free from being polluted, and high-efficient and clean production and zero-emission of waste water and waste gas can be realized.

A method for preparing the tungsten tungsten trioxide, characterized by comprising: dividing the concentrates were mixed with crab and calcined silica, to obtain a tungsten trioxide containing fired product.




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Provided is a preparation method of industrial purple nano-needle tungsten oxide, wherein ammonium paratungstate 5(NH4)2O⋅12WO3⋅5H2O, tungstic acid mWO3⋅nH2O (m≥1, n≥1), or oxides of tungsten WOx (2≤x≤3) is used as raw material, and a declined rolling furnace pipe is employed. At the inlet of the furnace pipe, the raw material is conveyed from the inlet into the heated furnace pipe by a feeder unit, and is moved gradually from a low temperature area to a high temperature area under the rotation of the declined furnace pipe; the raw material is reduced by H2 at the high temperature area, to obtain purple nano-needle tungsten oxide WO2.72 , the obtained tungsten oxide WO2.72 is moved gradually toward the outlet under the rotation of the declined furnace pipe, and is discharged from the outlet, as well cooled to about room temperature.

The method for preparing a nano-needle purple tungsten oxide, wherein is paratungstate 5 (NH 4) 2 O · 12WO 3 · 5H 2 O as raw materials, the following steps:

A, With a feed device from the feed end of the tungsten Chung-ammonium 5 (NH 4 of 5) 2 O Visual & 12WO 3 · 5H 2 O from the feed inlet pushed into to the heated furnace tube, in the role of rotation of the tilt furnace tube, gradually from low temperature zone to move to the high temperature zone;

B, Ammonium paratungstate (NH 4) 2 O · 12WO 3 · 5H 2 O was heated to decomposition of the tungsten trioxide WO 3, ammonia NH 3, and water vapor H 2 O;

C, In the furnace tube so that ammonia NH 3 is thermally decomposed to generate a reducing gas of hydrogen H 2;

D, The material in the rotation of the furnace tube inclined to continue to move to the high-temperature region, when the when material temperature continues, the tungsten trioxide WO 3 is hydrogen H 2 gradual reduction generated purple oxide of tungsten WO 2.72.




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The invention discloses a manufacturing method of tungsten oxide through holes.

The manufacturing method of the tungsten oxide through holes comprises the following steps:

(1) Forming tungsten through holes according to an existing technology, filling tungsten, and carrying out tungsten planarization.

(2) Forming tungsten oxide through oxidation.

(3) Depositing a layer of oxidation film or a dielectric substance layer which can achieve the same effect on the surface of the tungsten oxide formed in the step (2) by adopting chemical vapor deposition.

(4) Grinding the oxidation film or the dielectric substance layer which can achieve the same effect to expose the tungsten oxide by adopting a grinding mode or a method of dry method back carving, and thus forming the tungsten oxide through holes.

The manufacturing method of the tungsten oxide through holes solves the problem of leakage access formed between a top metal layer and a tungsten through hole titanium nitrogen compound barrier layer, and can improve a resistive random access memory erase operation window and reliability.


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Preparation of ultrafine kind of tungsten oxide template method steps as follows:

(1) 1-50mg a diameter of 2-30nm, the number of layers of 1-30 layers of carbon nanotubes added to 50-30mL of anhydrous ethanol, ultrasonic dispersion 24h , to obtain a solution A;

(2) 250mg of sodium tungstate crystals were dissolved in the 50-100mL volume ratio of 2:3 mixture of ethanol and distilled water, and then added dropwise at a concentration of 36.5% hydrochloric acid 0.1-20mL, a precipitate B;

(3) A and mixture B, dispersing 5-48h, filtered and dried to give a carbon nanotube / tungsten oxide precursor C, will be placed in a horizontal quartz reactor, wherein the charge to the oxygen, the reaction temperature is 400-1100 ℃, holding time 10-24h, cooling, to obtain a particle size of the tungsten oxide particles of 10-500nm. The present invention is easy to get raw materials, low cost, environmental pollution.  

Preparation process is simple, small particles of tungsten oxide obtained high purity, uniform distribution.




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