Tungsten Trioxide Doped Films Preparation

Tungsten trioxide (WO₃) doped film is an excellent hydrogen sensitive material, it has been widely studied and applied because of its good electrochromic and gas electrochromic, photochromic, electrochemical properties, especially in the gas photochromic properties of gas sensors. In the catalytic precious metals platinum (Pt) palladium (Pd), etc., WO₃film has good gasochromic effect to H₂ at room temperature, which shows it is an important functional material.

The temperature of tungsten trioxide film prepared by sol-gel method and the Combination of DC magnetron sputtering doped with Pd (or Pt) crystallization is higher than that of pure tungsten trioxide film. There are small amount of crystalline structure at 460 ℃ annealing treatment. The spectrophotometer test of results shows that: pure WO₃ gel film has a high light transmittance (> 90%), but mixed with palladium or platinum thin film doped transmittance decreased significantly; and in the same condition of temperature, palladium-doped film doped is higher than the transmittance of the film . The transmittance of platinum-doped film sample increases by the annealing temperature at 100 ℃, 200 ℃, 300 ℃, 400 ℃, 500 ℃ .The film transmittance is gradually decreased, which is consistent with doped tungsten trioxide films.

The preparation of tungsten trioxide doped Pt (Pd) film based on the sol-gel method and the DC magnetron sputtering method, in the preparation of tungsten acid sol was added H₂O₂, ethanol can enhance the stability of the acid sol. When the molar ratio of H₂O₂ and tungsten acid is 1: 2, ethanol and acid volume ratio of 1: 2, the sol keeps long time, and the film plays a preservation effect. Tungsten trioxide surface becomes relatively flat after 100 ℃ annealing process, its molecules are tetrahedral structure. Tungsten trioxide surface becomes relatively flat after 400 ℃ annealing process, its molecules becomes cube structure too.

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