Application of Barium Tungsten Electrode in Low-Temperature Plasma

Low-temperature plasma refers to plasma generated at relatively low temperatures (usually room temperature to several hundred degrees Celsius). It has attracted much attention due to its unique advantages in materials science, biomedicine, environmental science and aerospace technology.

Barium tungsten electrode is usually composed of tungsten (W) matrix and barium (Ba) compound. The high melting point and stability of tungsten, combined with the low work function of barium, give barium tungsten electrode excellent electron emission performance and high durability, making it a key component in low-temperature plasma applications.

Specific application of barium tungsten electrode in low-temperature plasma

1. Electron Emission Source

Barium tungsten electrode is often used as an electron emission source in low-temperature plasma. Due to its low work function, it can efficiently emit electrons at a lower voltage, thereby generating and maintaining a stable plasma. Generally used in (1) plasma enhanced chemical vapor deposition (PECVD): used to prepare thin film materials, such as insulating layers or protective layers in semiconductor devices; (2) plasma etching: precise etching of the material surface by active particles in the plasma, widely used in microelectronic processing.

2. Plasma Diagnostics

Barium tungsten electrodes can also be used to measure and diagnose plasma parameters. By analyzing the current-voltage characteristics of the electrode, key parameters such as plasma density and temperature can be inferred. Its high stability and durability make it particularly suitable for long-term experimental or industrial systems.

3. Gas Discharge Lamps

In gas discharge lamps (such as fluorescent lamps or high-pressure gas discharge lamps), barium tungsten electrodes are often used as cathodes. Their low work function and high stability can provide a stable electron flow, improve the starting performance of the lamp and extend its service life.

4. Plasma Thrusters

In the aerospace field, low-temperature plasma technology is used in thruster systems. As an electron source, barium tungsten electrodes help generate and maintain plasma, drive ion or plasma jets, and thus achieve efficient propulsion. This application has potential value in microsatellites and deep space exploration.

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