Tungsten Probe Applied for Semiconductor Testing

Tungsten probe for semiconductor testing may be an alloy probe made of rhenium tungsten alloy, or a tungsten probe made of pure tungsten. Wherein, the contact resistance of rhenium tungsten alloy is slightly higher than tungsten. But their fatigue resistance is similar. In addition, the lattice structure of rhenium tungsten alloy is tighter than tungsten, so the top surface of the rhenium tungsten probe is smoother.

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It means that the tip of the rhenium tungsten probe is less likely to be contaminated, easier to clean, and its contact resistance is more stable than tungsten probe. Therefore, the rhenium tungsten probe is more suitable than pure tungsten probe for semiconductor testing. Certainly, other parameters of the probe will also affect the test results, such as the diameter and shape of the tip, the contact pressure, and the flatness of the prober, etc.

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