W18O49 Nanorod Prepared by Sputtering Method

W₁₈O₄₉ is a kind of non-stoichiometric tungsten oxide (WO_3-x). At present, the researches on the preparation of W₁₈O₄₉ at home and abroad mostly focus on the preparation methods of W₁₈O₄₉ nanowires and nanorods. W₁₈O₄₉ nanorod can be successfully prepared by sputtering method.

What is sputtering method? It is an important method for preparing thin films. During the preparation process by this method, the inert gas is ionized by huge energy that generated by DC or high frequency electric field. Then the ionized inert gas exchanges the energy with the atoms or molecules on the target surface through the impact process, which follows the sputtering. The thin film can be successfully prepared by this method at last.

W₁₈O₄₉ nanorod can be successfully prepared by sputtering method, which is as follows:

1. Quartz reactor glass plate is used as support substrate during the preparation process. And W₁₈O₄₉ nanorod is grown on this kind of substrate.

2. Under atmospheric pressure, the tungsten film sample is heated to 700°C in presence of nitrogen.

3. Ethylene is introduced into the reactor. And the reaction is carried out for 20 minutes. The components of the output gas are analyzed by on-line gas chromatography monitor device.

4. The sample is cooled to room temperature in nitrogen atmosphere, so as to prepare W₁₈O₄₉ nanorod successfully.

The prepared W₁₈O₄₉ nanorod has a diameter range of 15-20 nm and an average length range of 50-250 nm, growing uniformly on tungsten film. It grows on both sides of the film simultaneously. In addition, the yield of W₁₈O₄₉ nanorod is high. High-resolution transmission electron microscopy is applied to analyze the structure and the phase composition of the prepared W₁₈O₄₉ nanorod. HRTEM images shows that the distance between crystal faces along the long side of nanorod is 0.378 nm.

W₁₈O₄₉ nanorod can be successfully prepared by sputtering method. It is a feasible method with advantages of fast deposition speed and good repeatability. W₁₈O₄₉ nanorod prepared by this method not only has quality, but has a strong absorption capacity to reaction substrate.

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