Tungsten Oxide Gaseous Doping

Tungsten oxide, also known as tungsten trioxide or tungstic anhydride, WO3, is a chemical compound containing oxygen and the transition metal tungsten. It is obtained as an intermediate in the recovery of tungsten from its minerals.Tungsten ores are treated with alkalis to produce WO3. Further reaction with carbon or hydrogen gas reduces tungsten trioxide to the pure metal.

The procsses disclosed is for preparing a film of fluorine-modified tungsten oxide on a substrate. The process comprises providing a tungsten oxide film on the substrate and then exposing the tungsten oxide film at an elevated temperature to a stream of a gaseous fluorocarbon. The exposure takes place for a time sufficient to modify the tungsten oxide with fluorine and form a film having modified infrared adsorption and reflectant properties.

Novel process is disclosed for preparing a fluorine-modified tungsten oxide. The process comprising depositing a tungsten oxide film on a substrate and subsequently exposing the film, at an elevated temperature, to a stream of a gaseous fluorocarbon compound for a time sufficient to decompose the compound and fluorine-modify the tungsten oxide. According to the present process, the resultant fluorine-modified tungsten oxide film has modified infrared absorption and reflection properties. The gaseous fluorocarbon compound can be provided diluted with other gases such as nitrogen or air when it is exposed to the tungsten oxide film on the substrate.

tungsten oxide

 

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