Preparation Experiment of Tungsten Tube (CVD)

Experimental material: high-purity hydrogen, high purity argon gas and high-purity tungsten hexafluoride and deposition matrix: copper tube.

Experimental procedure:

Decontaminating, acetone washing and drying the surface of deposition matrix, which would be placed in the reaction chamber then.

To avoid the explosion due to hydrogen mixed with air, argon should be purged into the reaction chamber and all the pipelines to empty the air. After emptying air, open the hydrogen flow needle valve, pass over the hydrogen and then light the exhaust gas discharged, then close the valve;

Heating the deposition matrix by current to make it achieve the required deposition temperature;

After mixing the WF₆ and H₂ according to a certain proportion, passing them through the reaction chamber through the flow control device;

WF₆ and H₂ react chemically on the surface of deposition matrix, to obtain deposition layer of refractory metal;

After a certain reaction time, turn off the heating power and reactive gas control valve, so the reaction chamber will be cooling;

Removing the sample after the temperature drop to below 100 ℃, and obtaining tungsten tube by means of cutting, and the removal of the deposition matrix.

By changing the deposition temperature and gas flow rate to get tungsten tube in different processes, and then test its properties.

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