Preparation of Tungsten Trioxide Thin Film 1/2

By reactive magnetron sputtering and sol-gel method, tungsten powder peroxide polytungstate prepared thin films of tungsten trioxide. Tungstate peroxide polytungstate reactive magnetron sputtering method and prepare the necessary legal tungsten trioxide film Reagents, major equipment, preparation work, test procedures, and test flow chart lists the two methods, but also columns an orthogonal experimental factor level table and orthogonal design table. This paper using atomic force microscopy, dual-beam UV-Vis spectrophotometer, X- diffraction to characterize the tungsten trioxide film prepared by the above two methods.

AFM results show that: the sample surface tungsten trioxide film prepared by magnetron sputtering reaction is more uniform and compact than the surface of the sample prepared by sol-gel method, and the sample preparation tends plane molecular structure of the former, while the latter molecule sample preparation tends tetrahedral structure. Transmittance test results show that: the light transmittance of the sample are two ways to get closer, but the difference in absorption magnetron sputtering samples of different wavelengths of the sample is greater than the sol-gel method; transmission after annealing at 200 ℃ samples Spectral almost no change, but above 300 ℃ annealed sample transmittance decreased, and the decrease of annealing temperature, the higher the more the light transmittance.
 
Sol-gel method sample annealed at 200 ℃ treated microstructure Figure

X- diffraction results show that: the sample after annealing at 350 ℃ was no significant spectrum sharp diffraction peak, indicating that all amorphous; samples after a temperature range of 350 ~ 400 ℃ annealing the resulting spectrum sharp diffraction peak intensity is growing, indicating gradually transformed into crystalline; the sample in the range of 450 ~ 500 ℃ annealed crystal diffraction peak intensity increases at the same time, the number also increased, because at this temperature for treating the sample gradually from a crystal into two crystal system coexist. Tungsten trioxide films prepared by these two methods are uniform and compact, good light, for the preparation of doped tungsten trioxide sensitive material to lay a solid foundation.

• < Prev
• Next >