Cracking Causes Analysis of CVD Tungsten Tube

Cracked tungsten tube prepared by chemical vapor deposition is investigated by ring machine cutting method and X-ray stress analysis system. The results shows that crack initiating at two neighboring columnar crystal grain boundaries of the internal surface with the action of large residual tensile stress in the internal surface of the tungsten tube, and the propagation expended from columnar crystal grain boundaries to the outer surface of the tungsten tube. The existence of a large residual compressive stress on the outer surface of tungsten tube can arrest propagating cracks.

 

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