Using Microwave Plasma Method Producing Tungsten Vanadium Dioxide (1)

The study found that vanadium dioxide will occurs first order phase transition in about 68 ℃, during the phase change process, vanadium dioxide (VO2) can occur reversible mutations  in resistivity, magnetic, optical index, refractive index and transmissivity. Although VO2 is vanadium-titanium oxide of MIT characteristic’s which is the closest to room temperature, but its phase transition temperature higher than room temperature is still greatly hindered the application of VO2. It is possible to use doping method to change the temperature of VO2 to improve VO2 range of applications. Way of doping method has cation and anion doping. At present, there has many ways to doping VO2 such as sol - gel method, hydrothermal synthesis doping method, a sputtering doping method, metal organic chemical vapor deposition method and the microwave plasma method, and so on.
The experiment found that by microwave plasma method to produce VO2 film can reduce the VO2 powder phase temperature, the phase transition temperature can be lowered to 35 ℃. And using microwave plasma method to produce tungsten vanadium dioxide film is selecting V2O5 and W2O3 as precursors coated in the glass, then by microwave plasma enhanced synthesis method producing.

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