Factors of the Roughness of CVD Tungsten Tube Surface

As can be known from the result of the crystal phase test, the foreign impurity particles can seriously affect the surface roughness of CVD tungsten tube. If the impurity particle is larger, the impact is more significant.

The deposited layer where impurity particles exist is presenting radial columnar crystals.

When there is impurity particles deposited substrate surface, due to the presence of foreign particles, the gas flow state of the portion of the reaction will change, resulting in a faster growth rate of the site to obtain a lateral growth space, and this advantage will be further expanded. And it will eventually lead to the deposition surface roughness increases.

Mutual interference among the deposition grain growths will also affects the surface roughness of CVD tungsten tube. In order to improve the smoothness of the surface of the tungsten tube, WF₆ can be discontinuously passed over the reaction chamber during deposition process.

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