Effect of Different Deposition of Matrix Position on Tungsten Tube Morphology

Different position of deposition matrix has a significant impact on the morphology of tungsten tube.

In the end position near the gas outlet, the temperature in temperature region and in deposition temperature is relatively close, but due to the influence of the early deposition reaction, the concentration of WF₆ and H₂ is lowered, and the concentration of HF is increasing, therefore, the speed of tungsten atoms reduction slow down; the crystal grains in temperature region are much finer than in deposition organizations; the thickness of tungsten tube near the gas outlet end is significantly thinner.

Near the gas inlet end position, due to the impact of the inlet gas, the deposition temperature of this place is relatively low, so the columnar crystal of deposited layer microstructure is much smaller in this position; the deposition growth rate is relatively slow.


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