Producing Tungsten Trioxide Nano Films

In recent years, tungsten trioxide is considered one of the best materials for sensitive material which is used to detect NO_x, NH₃, and O₃. The properties of tungsten trioxide nano film can improved film performance significantly. So using nano tungsten trioxide film as a sensor, the sensitivity of it can be significantly improved. produxing nano tungsten trioxide processes as follows:
1. First, using PECVD on polishing Si to form Si₃N₄, the Si₃N₄ surface sputtering fork point to Pt electrode. And then to use DC reactive magnetron sputtering method deposits 1500A WO₃ films.
2. In order to obtain good and stable performance semiconductor WO₃ film, processing two-step heat treatment at different temperatures. First, the film heat treatment for 6h at 300 ℃, with cooling to room temperature.
3. the putting film to second heat treatment at 600 ℃ for 12 hours then to obtain WO₃ gas sensing originals.

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