In Situ Ttemperature Measurements Via Ruby R Lines of Sapphire Substrate Based InGaN Light Emitting Diodes During Operation
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- Category: Tungsten & Sapphire Growth Furnace News
- Published on Tuesday, 28 January 2014 11:40
The temperature of encapsulated green and ultraviolet light emitting diodes (LEDs) in operation has been measured optically via the ruby R lines emitted by the residual Cr3+ contaminations in the sapphire substrate. These two photoluminescent R lines, which are excited by the electroluminescence of the LED itself, show a well-characterized line shift as a function of temperature and pressure. The temperature is found to rise linearly with the applied forward current of the LED at a rate of ≈1 K/mA. This optical temperature measurement based on monitoring the two ruby R lines could qualify as a sensitive method for an in situ temperature sensor for other sapphire substrate based semiconductor devices such as laser diodes and field effect transistors.
Indium–gallium nitride (InxGa1-xN) single-quantum-well (SQW) light emitting diodes (LEDs), grown by metalorganic chemical vapor deposition on sapphire, were transferred onto Si substrates. The thin-film InxGa1-xN SQW LED structures were first bonded onto a n+-Si substrate using a transient-liquid-phase Pd–In wafer-bonding process followed by a laser lift-off technique to remove the sapphire growth substrate. Individual, 250×250 μm2, LEDs with a backside contact through the n+-Si substrate were then fabricated. The LEDs had a typical turn-on voltage of 2.5 V and a forward current of 100 mA at 5.4 V. The room-temperature emission peak for the InxGa1-xN SQW LEDs was centered at 455 nm with a full width at half maximum of 19 nm.
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