Ion Gun Tungsten Filament Introduction

Ion gun tungsten filament (IG tungsten filament) is made of tungsten wire, which is indispensable components in scientific research and semiconductor manufacturing equipment and has been used to produce high current of H− ions and other aspects. Ion source filament owns many different types, such as single helix cylindrical filaments with one turn, flat spiral filaments, or planar filaments and so on. The major deficiency of its performance is that the energetic electrons produced by the surface of interior metal will escape. So the magneto-static fields produced by permanent magnets are designed to recapture more energetic electrons with lower number of permanent magnets to avoid this problem. To suit equipment requirements and functionalities, we modify appropriate filament configurations and specifications when we design such equipment. Tungsten is the most common functional material used to fabricate ion source filaments. Ion gun tungsten filament has some features that make it distinct from other materials.

 

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